Product Details
| Product Name | Star Series |
|---|---|
| Generic Product Name | Ultra High Purity Process Chemicals for Semiconductor/FPD Industries |
| Company Name | Mitsubishi Chemical Corporation |
| Department Name | Semiconductor Materials Dept., Information & Electronics Div., Advanced Solutions |
| TEL | +81-3-6748-7168 |
| Product Information | In recent years, the demand is increasing for high quality removal of particles and metals from small size semiconductor circuits during silicon wafer cleaning process. Star Series meets those demands with semiconductor process chemicals having metal impurity levels below 10ppt. Products: Hydrochloric acid, Nitric acid, Ammonia solution |
| Homepage |
Product Family (middle & small classification)
| middle classification | small classification |
|---|---|
| Specialty Chemicals | Etching Materials Detergents and Antifouling Agents |
| Electronic and Electrical Components and Products | Electronics Materials and Components Other Related Products for Electric and Electronic Devices |
Applications
| IT Ubiquitous network |
| Silicon wafer cleaning during semiconductor processing |