Product Details
| Product Name | Multifunctional Advanced Cleaning Solution, "AM1" |
|---|---|
| Generic Product Name | Advanced Cleaning Solutions |
| Company Name | Mitsubishi Chemical Corporation |
| Department Name | Semiconductor Materials Dept., Information & Electronics Div., Advanced Solutions |
| TEL | +81-3-6748-7168 |
| Product Information | AM1 is a high-performance electronic chemical solution used as an alternative RCA clean for batch and single wafer applications. It has the capability to remove both particles and metal impurities. Furthermore, it has superior performance for metal gate cleaning because it does not corrode silicon. – Single wafer cleaning (realize superior surface cleanliness in a short time) – Metal gate cleaning (no corrosion of tungsten or silicon) |
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Product Family (middle & small classification)
| middle classification | small classification |
|---|---|
| Specialty Chemicals | Detergents and Antifouling Agents |
| Electronic and Electrical Components and Products | Electronics Materials and Components Other Related Products for Electric and Electronic Devices |
Applications
| IT Ubiquitous network |
| ・Alternative RCA cleaning solution ・Metal gate clean solution |